|High Throughput and Precision |
Innovative Robotics’ wafer prealigners can quickly center and orient any silicon wafer from 100mm to 300mm by issuing a simple text command to the controller.
Innovative Robotics’ aligners offer the flexibility of operating in either high throughput alignment mode, with robot centering, or high precision mode, using the on-board translation axis for stand-alone wafer centering. Lift pin operation is available for use with “blade” style end-effectors.
The aligner integrates seamlessly with the IR-820C controller.